Processing of YBa2Cu3O7-x superconducting thin films for microwave device a

摘要

Abstract: Epitaxial YBa$-2$/Cu$-3$/O$-7$MIN@x$/ (YBCO) superconducting thin films have been grown on (100) MgO substrates by pulsed laser deposition. The characterization of YBCO superconducting thin films grown on MgO under the optimized condition has been performed with x-ray diffraction (XRD), Atomic Force Microscopy (AFM), magnetic property measurement in SQUID magnetometer and resistivity measurement. The fabrication and characterization of dual mode disc resonators (DMDRs) have been discussed with superconducting thin films grown under optimized deposition conditions. !7