500 watts industrial excimer laser at high repetition rate

摘要

Abstract: We have developed high repetition rate, high average power excimer lasers intended for industrial applications. They operate in the phototriggered mode and have a compact design. The first prototype has been proven to operate continuously up to 700 Hz and delivers more than 500 W average power. A second prototype is intended to work at the same repetition rate. It delivers up to 2 J output energy at low repetition rate. !3