A novel eco-friendly bath for electroless copper deposition

摘要

Methane sulphonic acid is most promising eco friendly acid replacing highly polluting acids like HF. In this study a novel eco friendly electroless copper methane sulphonate bath has been developed. The source material is copper methane sulphonate, which has high solubility, EDTA as chelating agent, glyoxylic acid as chelating agent and NaOH is used as a pH adjuster. The bath is optimized for the parameters affecting the rate of deposition. SEM studies shows refined grain size and thus a promising eco-friendly bath is developed.