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On the wavelength dependence of femtosecond laser interactions inside band gap solids

机译:带隙固体内部飞秒激光相互作用的波长依赖性

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摘要

3D laser microfabrication inside narrow band gap solids like semiconductors will require the use of long wavelength intense pulses. We perform an experimental study of the multiphoton-avalanche absorption yields and thresholds with tightly focused femtosecond laser beams at wavelengths: 1.3μm and 2.2μm. For comparisons, we perform the experiments in two very different materials: silicon (semiconductor, ~1.1 eV indirect bandgap) and fused silica (dielectric, ~9 eV direct bandgap). For both materials, we find only moderate differences while the number of photons required to cross the band gap changes from 2 to 3 in silicon and from 10 to 16 in fused silica.
机译:在窄带隙固体(如半导体)内部的3D激光微加工将需要使用长波长的强脉冲。我们对紧密聚焦的飞秒激光束在1.3μm和2.2μm波长下的多光子雪崩吸收率和阈值进行了实验研究。为了进行比较,我们使用两种截然不同的材料进行实验:硅(半导体,〜1.1 eV的直接带隙)和熔融石英(电介质,〜9 eV的直接带隙)。对于这两种材料,我们发现只有较小的差异,而穿过带隙所需的光子数在硅中从2变为3,在熔融石英中从10变为16。

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  • 来源
  • 会议地点 San Francisco CA(US)
  • 作者单位

    Aix Marseille Universite, CNRS, LP3 (Laboratoire Lasers, Plasmas et Procedes Photoniques)UMR 7341, 13288, Marseille, France;

    Aix Marseille Universite, CNRS, LP3 (Laboratoire Lasers, Plasmas et Procedes Photoniques)UMR 7341, 13288, Marseille, France;

    Aix Marseille Universite, CNRS, LP3 (Laboratoire Lasers, Plasmas et Procedes Photoniques)UMR 7341, 13288, Marseille, France;

    Aix Marseille Universite, CNRS, LP3 (Laboratoire Lasers, Plasmas et Procedes Photoniques)UMR 7341, 13288, Marseille, France;

    Aix Marseille Universite, CNRS, CINAM (Centre interdisciplinaire de Nanoscience de Marseille),UMR 7325, 13288, Marseille, France;

    Aix Marseille Universite, CNRS, LP3 (Laboratoire Lasers, Plasmas et Procedes Photoniques)UMR 7341, 13288, Marseille, France;

    Aix Marseille Universite, CNRS, LP3 (Laboratoire Lasers, Plasmas et Procedes Photoniques)UMR 7341, 13288, Marseille, France;

    Aix Marseille Universite, CNRS, LP3 (Laboratoire Lasers, Plasmas et Procedes Photoniques)UMR 7341, 13288, Marseille, France;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Femtosecond laser; Multiphoton absorption; Semiconductors; Dielectrics; Optical Breakdown;

    机译:飞秒激光;多光子吸收;半导体;电介质;光学击穿;
  • 入库时间 2022-08-26 13:44:53

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