Introducing high performance crystalfree™ pMEMS oscillators

摘要

High performance oscillators based on piezoelectrically transduced pMEMS™ resonators are introduced. pMEMS resonators consist of a piezoelectric material (AlN) on a single-crystal silicon layer substrate and typically have a quality factor of more than a few thousand and insertion loss close to −10dB. Plastic packaged pMEMS™ oscillators are immune to shock and vibration of 1500G and 20G, respectively, and have shown excellent long term frequency stability at 25°C, 125°C, −40C and hysteresis testing over −40°C to 125°C. Due to high quality factor and low motional impedance, oscillators based on pMEMS™ resonators can deliver low phase noise well below <1.0ps for bandwidth from 12kHz to 20MHz.