The effects of acoustic mismatch on internal dielectrically transduced micromechanical resonators

摘要

This paper presents a supplement to the theory of internal dielectric transduction presented in by including the effects of acoustic mismatch on the resonant frequency and motional impedance of internal dielectrically transduced micromechanical resonators. Analytical expressions for the mode shapes in said resonators are mathematically derived and verified for various dielectric and resonator body materials by comparing numerical simulation results in MATLAB with finite element analysis (FEA) results using COMSOL. Correction factors for mismatched materials are presented to aid in the precise and optimal design of internal dielectrically transduced micromechanical resonators for applications up to tens of gigahertz.