A new method of electrolytic machining to produce micro parts is proposed. Micr structure, such as micro sensor, micro actuator, being developed in the industry of the micro electro-mechanical system (MEMS), is conventionally fabricated by IC (Integrated Circuit) related process. In order to produce these products in large quantity, IC fabrication method appears to be too expensive and also inappropriate for the purpose. Hence a forming method, such as injection molding, hot embossing, etc., could then be selected. The mold of the micro component for the corresponding process would thus be needed. A micro machining method is necessary to generate such a micro mold. The proposed machining method is for this purpose. Depending on the positioning accuracy of the system and the dimension of the electrode been used in this method, a highly precise micro component can be produced. A micro slit of 50 mu m-line-width could be accomplished, and the expected surface roughness will be better than 0.1 mu m R_(max) in this project. This micro-fabrication method will be very useful to the industry of MEMS.
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