Novel Black Photoresists with High Photospeed and High Optical Density Based on Latent Pigments

摘要

A novel black photoresist based on latent pigments is under development. The system contains a maximum of four different organic pigments in high concentrations. Different sets of pigments are under investigation in order to optimize the system. The advantage of the use of latent pigments is the colour difference between latent pigment and it's regenerated pigment: As latent pigment the material has a certain transmission allowing it to expose with UV light. After regeneration the layer shows high optical density with F10 as a back light. The material shows high temperature resistance and high electrical resistance.