Additive Manufacturing of Titanium Dioxide for Dielectric Photonic Crystals

摘要

Fabrication of 3D dielectric photonic crystals in the visible and in the infrared range typically requires sub-micronstructural features and high-refractive index materials. We developed a template-free additive manufacturing (AM)process based on direct laser writing (DLW) that can create complex 3D architectures out of titania (TiO2) with ～100 nmresolution. In this process, we synthesize hybrid organic-inorganic materials that contain titanium clusters coordinatedwith acrylic ligands to prepare a photoresist that is amenable to two-photon lithography (TPL). We sculpt a pre-ceramicarchitecture using TPL and then pyrolyze in air at 900℃ to remove the organic constituents to produce a replica of theoriginal structure with ～70% reduced linear dimensions. Energy-Dispersive Spectroscopy (EDS) and Ramanspectroscopy confirm the constituent solid to consist predominantly out of rutile titania.We demonstrate this process by fabricating titania woodpile structures with lateral dimensions of 70 × 70 μm and lateralperiodicities between 1.0 and 1.3 μm. Fourier Transform Infrared (FTIR) spectroscopy reveals passive tuning of thereflectance peak between 1.7 and 2.3 μm, which agrees with Plane Wave Expansion simulations. This titania AMprocess offers a promising pathway to efficiently fabricate complex 3D nano-architectures out of a high-index materialfor 3D dielectric photonic crystals in the visible and the infrared.