100-Hz KrF laser plasma x-ray source

摘要

Abstract: The Rutherford Appleton Laboratory RepetitiveLaser-Plasma X-ray Source has been scaled to repetitionrates of up to 100 Hz. An average power of 40 mW/sr hasbeen measured from mylar tape targets in the spectralregion 0.28 $LS h$upsilon $LS 0.53 keV (the `waterwindow') with approximately 30% of the emission in thehydrogen-like carbon ion L$alpha (h$upsilon $EQ 368 eV)line. A scanning transmission x-ray microscope (STXM)was used for the first time with a laser-plasma sourceto generate test images. The source was also run withCu and Fe targets to generate h$upsilon $APEQ 1 keVx-rays in atmospheric pressure helium, yielding at 30Hz an average power of approximately 9 mW/sr. Proximityx-ray microlithography images in 1.2 $mu@m thickphotoresist have accurately reproduced features ofapproximately 0.3 $mu@m.!