Experimental investigation of factors that restrict the gas lifetime in excimer KrF lasers

摘要

Abstract: ults of experimental investigation of factors which restrict the gas lifetime in pulsed discharge KrF laser have been presented. The correlation in between gas mixture lifetime and constant rate of fluorine concentration decrease has been observed. It has been determined that the main canal of fluorine concentration decrease is the reaction of formation of metal fluorides of electrodes. Compositions of gas phase impurities of laser mixture which are formed during the laser operating and their influence on the characteristics of laser emission have been ascertained. An absence of appreciable influence of absorption and scattering of laser emission by impurities has been revealed. The mechanism of influence of solid-state impurities on lasing energy has been suggested.!16