Ultra precision milling of mechanical components and functionality systems for optical and electro optical modules

摘要

In the preparation of the mass production of semiconductor modules, the manufacture of function-prototypes is an indispensable step towards the assessment of the future functionality. These prototypes are conventionally produced by technologies used in the semiconductor technology. This paper shows that the manufacture of functional patterns using an ultra precision machining system is possible in a very short process chain. This technology allows to manufacture structures such as V-grooves, as well as cavities with conical, pyramid, or square transverse sections with a geometrical accuracy of sub-micrometers and, if necessary, with an optical surface quality, allowing optical functions. Materials used are metals such as brass, German silver, but also semiconductor materials, ceramics, and glass. This paper presents the results of milling operations with monocrystalline diamonds in copper, German silver, and silicon.