A micro-stage for linear-rotary positioning

摘要

In this paper, a novel Z-θ_Z micro-stage is designed and constructed by utilizing a smooth impact friction drive. The stage is configured by two driving units, a moving element and a base. Each driving unit consists of two PZTs and a friction element. One end of each PZT is fixed on the base of the stage, and the other end is attached on a permanent magnet as the friction element. The moving element, which is a steel cylinder, is supported and moved by the friction element. Magnetic force generated by permanent magnet is utilized to stabilize the driving condition between the moving element and the friction element for friction drive. The size of the stage is less than 1 cm~3. The stroke and the maximum speed of the stage in Z-direction are 3.8 mm, 5.7 mm/s, respectively. The stroke in θ_z-direction is unlimited and the maximum rotational velocity is 26 rpm.