Applicaiton and study of giant magnetostrictive actuator in subsnanometer displacement feed

摘要

X-ray interferometry is the most effective mehtod of nanometre (NM) calibration at present,it is very significant to hte developemtn of nanotechology.But,being influenced by the function porperty of its actuato,there is certain limitation in its applciatiosn and disssemination at the moment.In view of this probelmemploying giant mangnetostrctie materials to ocnstruct the base of the micro-position is propsoed in this paer.The actuator described here has the charactteristics of bigger displacement range,higher resolution and simpler structure,the application of this actuator in the X-ray interfereometer will promote its development greatly.