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CHEMICAL VAPOR DEPOSITION IN SPOUTED BED REACTORS

机译:沸腾床反应器中的化学气相沉积

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摘要

This paper introduces the spouted bed chemical vapor deposition (SBCVD), an alternative technique to fluidized bed CVD for the coating of particles. The raison d'etre of SBCVD is first presented, followed by a literature survey of corresponding applications. Then, research performed in the authors group is detailed, concerning the use of SBCVD for the superficial doping of superalloy powders that are used as raw material of bond coats in thermal barriers applied on turbine blades. Deposition of Re from di-rhenium decacarbonyl (Re_2(CO)_(10)) is investigated due to both the reported improvement of the high temperature behavior of Re-doped superalloys and to the challenge of a low temperature CVD route for the processing of metallic Re. Transport properties of Re_2(CO)_(10) namely vapor pressure as a function of temperature are investigated first. Finally, SBCVD of Re and Ru on the surface of as received commercial NiCoCrAlYTa powders is performed. The morphology and distribution of the two elements on the surface of each particle are investigated with scanning and transmission electron microscopy combined with energy dispersion spectroscopy.
机译:本文介绍了喷射床化学气相沉积(SBCVD),这是流化床CVD涂层颗粒的另一种技术。首先介绍了SBCVD的存在原理,然后对相应应用进行了文献综述。然后,作者小组进行了详细的研究,涉及SBCVD在高温合金粉末的表面掺杂中的应用,这些粉末用作涡轮叶片上热障中粘结涂层的原材料。由于报道了掺of超合金的高温行为的改善以及对低温CVD路线的挑战,研究了从二carbonyl十羰基(Re_2(CO)_(10))沉积Re的问题。金属稀土首先研究了Re_2(CO)_(10)的传输特性,即蒸气压随温度的变化。最后,在收到的市售NiCoCrAlYTa粉末表面进行Re和Ru的SBCVD。用扫描和透射电子显微镜结合能量色散光谱法研究了两种元素在每个粒子表面的形态和分布。

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