FABRICATION OF CHEMICAL SENSOR PACKAGING WITH STEREOLITHOGRAPHY

摘要

Stereolithography is an additive fabrication method. It has the capability to fabricate high aspect ratio structure with low cost and short fabrication time. Several types of packages for chemical sensors and miniaturized gas chromatography have also been developed. In order to show the compatibility of a Stereolithography part with a micro-machined silicon die, a reaction chamber packaging for a chemical sensor has been fabricated and tested with the sensor. The real time impedance change of the chemical sensor with respect to the chemical gas was demonstrated.