PREPARATION OF Y_2O_3 BASED PHOSPHOR FILMS BY A PYROLYSIS TECHNIQUE

摘要

(111) oriented Eu, Tb and/or Ce doped Y_2O_3 thin films were prepared by a pyrolysis technique using acetyl-acetonates complexes. Acetyl-acetonates were evaporated in evacuated condition (2X10~(-5) Torr) and depositted on the fused quartz substrates. The films, which were oxidized and crystallized at 600 ℃ in air, were oriented with the cubic (111) plane. Blue (λ=413 and 437 nm), green (λ=490 and 545 nm) and red (λ=611 nm) colored emissions were oberved from Ce, Tb and Eu doped Y_2O_3 films, respectively.