DESIGN OF HIGH-BAY CLEANROOMS AND AIR FLOW ANALYSIS BY COMPUTATIONAL FLUID DYNAMICS

摘要

A high-bay cleanroom tends to accumulate more particles in air streams than a regular sizerncleanroom and causes higher possibility of contamination to the products. This is due to the fact that airrntravels a longer distance in a high-bay cleanroom than a regular size cleanroom. This paper exploresrnsome design practices on how to reduce the particle accumulation rate in a high-bay cleanroom. As anrnexample, how to reduce the size of the vortex behind a big equipment or product under manufacturing inrnthe cleanroom is discussed. Computational Fluid Dynamics (CFD) is used as a tool in the analysis tornpredict flow properties including velocity, flow rate and pressure.