Abstract: This paper reviews optical reflectometry techniques that are capable of achieving spatial resolutions of less than 1 cm. Advantages and disadvantages of these techniques are discussed. A white light interferometry technique known as optical low-coherence reflectometry is emphasized. This technique has been used to obtain spatial resolutions on the order of tens of microns and reflection sensitivities as low as $MIN@148 dB. !19
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机译：摘要：本文概述了能够实现小于1 cm的空间分辨率的光学反射测量技术。讨论了这些技术的优缺点。强调了被称为光学低相干反射法的白光干涉法技术。该技术已用于获得数十微米量级的空间分辨率和低至$ MIN @ 148 dB的反射灵敏度。 ！19
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