Atomic Transport in Nano-crystalline Silicides Studied by in situ Auger Electron Spectroscopy: Interfacial Reaction Effect

摘要

Silicide growth via reaction between a metallic film and a Si substrate has been well documented. In general, atomic transport kinetic during the growth of silicides is considered to be the same as during equilibrium diffusion, despite the reaction and its possible injection of point-defects in the two phases on each side of the interface. To date, the main studies aiming to investigate atomic transport during silicide growth used immobile markers in order to determine which element diffuses the fastest during growth and in which proportion. The quantitative measurements of effective diffusion coefficients during growth was also performed using Deal-and-Groove-type of models, however, these effective coefficients are in general not in agreement with the interdiffusion coefficients calculated using the equilibrium diffusion coefficients measured during diffusion experiments. In general, atomic transport kinetic measurements during growth and without growth are performed using different types of samples for experimental reasons. In this paper, we discuss the possible use of ultrahigh vacuum in situ Auger electron spectroscopy in order to measure the effective diffusion coefficient during growth, as well as the equilibrium self-diffusion coefficients, in the same samples, in the same experimental conditions. The first results on the Pd-Si system show that atomic transport during Pd_2Si growth is several orders of magnitude faster than at equilibrium without interfacial reaction.