首页> 外文会议>Design, Test, Integration amp; Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09 >What happens turning a 250µm thin piezo-stack sideways? An experimental and analytical approach to one-side-actuated piezoelectric micro drives, regarding electrode layouts and directions of deflection
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What happens turning a 250µm thin piezo-stack sideways? An experimental and analytical approach to one-side-actuated piezoelectric micro drives, regarding electrode layouts and directions of deflection

机译:将250µm的薄压电堆栈横向转动会发生什么?关于电极驱动和偏转方向的单侧压电微型驱动器的实验和分析方法

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摘要

This paper leads to a one-side-actuated piezoelectric membrane showing an upward deflection under forward bias. It is also shown that one-side-actuated piezoelectric membranes achieve comparable and higher deflections as common bimorph structures with similar dimensions. The piezoelectric substrate functions as complete active element, since it is both actuator and deflectable membrane.
机译:本文导致了一侧致动的压电膜在正向偏压下显示出向上偏转。还显示出,与具有相似尺寸的普通双压电晶片结构相比,一侧驱动的压电膜可实现相当和更高的挠度。压电基板既是致动器又是可偏转的膜,因此起着完整的有源元件的作用。

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