ENERGY EFFICIENT LOW OPERATING COST CLEANROOM AIRFLOW DESIGN

摘要

Up to 40% of the non process related initial and operating costs of cleanrooms are dependent on the airflow raternused in cleanrooms. Three factors that largely affect the energy and operating cost efficiency of cleanrooms are: a) thernairflow rate design method, b) the type of air handling system and air flow distribution and c) the performance characteristicsrnof the filter system utilized. A critical review of airflow rate design charts is presented, followed by a review of analyticalrndesign methods such as the dilution and transient analysis models with an emphasis on energy efficient design. The effect ofrnvarious air-handling and new lower pressure drop filtration systems are also considered. Finally, a few examples ofrnutilization of the newer design methods and air handling/filter systems are presented showing the associated energy savings.