Xe(He, Kr)―I_2(Cl_2) GLOW, BARRIER AND CAPACITIVE DISCHARGE EXCILAMPS

摘要

In the present paper, Iodine, XeI~*, XeCl~*, KrCl barrier, glow and capacitive discharge excilamps have been studied. Xe―I_2, He―I_2 or Xe―He―I_2 excilamps emit at iodine monatomic resonance lines in the range of 180 ― 210 nm, and on Xel~* molecule band (λ_(max) = 253 nm). Besides that, by varying pressure and mixture composition, it is possible to control relation between iodine monatomic lines and XeI~* molecule band radiation intensity. The efficiency level is up to 12 %. The lifetime in sealed-off excilamps was more 1000 h. It is shown that at barrier KrCl and XeCl excilamps excitation by short (2/2,5 μs) unipolar or bipolar voltage pulses the efficiency is higher than by sine pulses excitation. Output at λ～222 nm up to 100 W and at 308 nm up to 75 W from barrier discharge excilamps was obtained. Presence of filaments occurs to be a necessary condition to obtain high efficiency since in that case a demanded level of excitation specific power is being achieved. Radiation pulse delay relatively to excitation in the conditions of homogeneous discharge probably demonstrates low efficiency of KrCl and XeCl~* molecules formation at a low level of excitation power. Output at λ～222 nm up to 190 W and at 308 nm up to 91 W from glow discharge excilamps was demonstrated.