Evaluating optical and supersmooth surface using AFM in optical manufacturing technology

摘要

In this paper, a testing method for optical polished surface in level instrumentation and supersmooth surface in soft x-ray system using Atomic Force Microscope (AFM) is presented, and some testing results reached to nanometer RMS are listed. In this paper it is indicated that, different size of polished platforms are formed as difference of optical polished method and period. Important applications of AFM testing method for improving optical polished technology and obtaining supersmooth surface are introduced in the paper.