Nano-displacement control with optical heterodyne interferometry

摘要

This paper presents a positioning control system based on an optical heterodyne interferometric technique associated to a home-made high frequency electronic board. This system aims to control the translation of a mechanical stage with a quantified step as low as 0.258 574 970 5 (5) nm. Intrinsic relative uncertainty is very low. Hence the method is suitable for long displacement range, even millimeters long. Experimental results show the reliability of the method.