Large-Scale Pohysilicon Surface Micro-Machined Spatial Light Modulator

机译：大型多晶硅表面微加工空间光调制器

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

A large-scale, high speed, high resolution, phase-only microelectromechanical system (MEMS) spatial light modulator (SLM) has been fabricated. Using polysilicon thin film technology, the micro mirror array offers significant improvement in SLM speed in comparison to alternative modulator technologies. Pixel opto-electromechanical characterization has been quantified experimentally on large scale arrays of micro mirrors and results are reported.

机译：已经制造了大规模，高速，高分辨率，仅相位的微机电系统（MEMS）空间光调制器（SLM）。与替代的调制器技术相比，使用多晶硅薄膜技术，微镜阵列在SLM速度上有显着提高。在大型微镜阵列上通过实验对像素光电性能进行了量化，并报道了结果。

著录项

来源
《Conference on MOEMS and Miniaturized Systems III, Jan 27-29, 2003, San Jose, California, USA》|2003年|p.259-265|共7页
会议地点 San Jose CA(US)
作者
Clara Dimas; Julie Perreault; Steven Cornelissen; Harold Dyson; Peter Krulevitch; Paul Bierden; Thomas Bifano;
展开▼
作者单位

Boston Micromachines Corporation, Watertown, MA;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
关键词
spatial light modulators; micro mirrors; actuator frequency response;

机译：空间光调制器;微镜;致动器频率响应;
入库时间 2022-08-26 14:10:32

相似文献

外文文献
中文文献
专利

1. Large-scale uniform optical focus array generation with a phase spatial light modulator [J] . Kim Donggyu, Keesling Alexander, Omran Ahmed, Optics Letters . 2019,第12期

机译：具有相空间光调制器的大型均匀光学焦点阵列产生
2. Asymmetrical optical lenslet array realized by spatial light modulator for measuring toroidal surfaces [J] . L. P. Zhao, N. Bai, X. Li Applied optics . 2008,第36期

机译：由空间光调制器实现的非对称光学小透镜阵列，用于测量环形表面
3. Graphene-based spatial light modulator using optical checkerboard AMC metasurface [J] . Sun Zhanshan, Huang Fumin, Fu Yunqi Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter . 2020,第1期

机译：基于石墨烯的空间光调制，使用光学棋盘AMC MEDasurface
4. Large-Scale Pohysilicon Surface Micro-Machined Spatial Light Modulator [C] . Clara Dimas, Julie Perreault, Steven Cornelissen, Society of Photo-Optical Instrumentation Engineers Conference on MOEMS and Miniaturized Systems . 2003

机译：大型Pohysilicon表面微加工的空间光调制器
5. Large-scale urban impervious surfaces estimation through incorporating temporal and spatial information into spectral mixture analysis [D] . Li, Wenliang. 2016

机译：通过将时空信息纳入光谱混合分析中进行大规模城市不透水地表估计
6. Comparison of vision through surface modulated and spatial light modulated multifocal optics [O] . Maria Vinas, Carlos Dorronsoro, Aiswaryah Radhakrishnan, 2017

机译：通过表面调制和空间光调制多焦点光学器件比较视觉
7. Comparison of vision through surface modulated and spatial light modulated multifocal optics [O] . Vinas Maria, Dorronsoro Carlos, Radhakrishnan Aiswaryah, 2017

机译：通过表面调制和空间光调制多焦点光学器件比较视觉
8. Spatial Light Modulators and Applications: Summaries of Papers Presented at the Spatial Light Modulators and Applications Topical Meeting Held on March 15-17, 1993 in Palm Springs, California. [R] . Quinn, J. W. 1993

机译：空间光调制器和应用：空间光调制器和应用主题会议上发表的论文摘要于1993年3月15日至17日在加利福尼亚州棕榈泉举行。

Large-Scale Pohysilicon Surface Micro-Machined Spatial Light Modulator

摘要

著录项

相似文献

相关主题

期刊订阅