Electro-mechanical Simulation of a Large Aperture MOEMS Fabry-Perot Tunable Filter

摘要

We are developing a micro-machined electrostatically actuated Fabry-Perot tunable filter with a large clear aperture for application in high through-put wide-field imaging spectroscopy and lidar systems, In the first phase of this effort, we are developing key components based on coupled electro-mechanical simulations. In particular, the movable etalon plate design leverages high coating stresses to yield a flat surface in drum-head tension over a large diameter (12.5mm). In this paproach, the cylinrical silicon movable plate is back etched, resulting in a noptically caoted membrane that is supended from a thick silicon support ring. Understanding the interaction between the support ring, suspended membrane, and coating iscritical to developing surfaces that are flat to within stringent dtalon requirements. In this work, we present the simulations used to develop the movable plate, spring suspension system, and electrostatic actuation mechanisms. We also present results from tests of fabricated proof of concept components.