Gripping-tool for MEMS-Assembly with an absolute distance measurement sensor using a fibre-optic WL-Interferometer with high measuring frequency

摘要

Reduction in the size of produced parts, increases the difficulty for precise manufacturing observation-processes and it makes manufacturing control cycles even more complex. Among all the production steps for micro-systems, assembly seems to be specially affected with this manufacturing handicap. Usual sensors used for the macro-world have to be modified or redesigned in order to address its use for the micro-world. This document presents the integration of a white light interferometer into a flexible fibre-scope used already for process monitoring purposes and which is mounted into a gripping-tool. The goal is to achieve a linear measurement between a gripping-tool and a target-part during the assembly process of hybrid micro systems.