High-Q Silica Microsphere Optical Resonator Sensors Using Stripline-pedestal Anti-resonant Reflecting Optical Waveguide Couplers

摘要

There is currently a significant amount of interest in the development of integrated optical sensors for a variety of applications. Attractive features of these types of sensors include miniature size and low operating powers. We have demonstrated a novel integrated optical sensor platform based on high-Q silica microsphere resonators and stripline-pedestal anti-resonant reflecting optical waveguide (SPARROW) optical couplers. Advantages of the planar SPARROW coupler include high light coupling efficiency, robust planar structure, and standard optical chip processing/fabrication techniques. High light coupling efficiencies (approaching 100%) have been observed using this sensor platform. Several sensor configurations are presented here, including one designed to reduce input optical power requirements. High resolution flexured-mass-based sensors which have been demonstrated include acceleration and seismic sensors. Proposed sensor concepts based on thermo-optic effects are also discussed.