首页> 外文会议>Conference on laser applications in microelectronic and optoelectronic manufacturing VII; 20090126-29; San Jose, CA(US) >Health risks of nanoparticulate emissions during femtosecond and picosecond pulsed laser machining
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Health risks of nanoparticulate emissions during femtosecond and picosecond pulsed laser machining

机译:飞秒和皮秒脉冲激光加工过程中纳米颗粒发射的健康风险

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摘要

Nanoparticles are known to cause adverse health effects. But the generation of nanoparticles cannot be avoided during laser machining, especially ultrashort-pulsed laser ablation which releases a high share of nanoparticles. The nanoparticulate size fractions emitted during picosecond (ps) laser ablation are compared with those released during femtosecond (fs) laser ablation using steel, zirconia and brass. At the same pulse energy, fs pulses release similar share of nanoparticles (>80%) in the aerosol fraction, with fs compared to ps generating a far higher share of ultrasmall (7 nm) sized particles during machining of metals and ceramics. The frequency maximum corresponds to the particle size of 50 nm independently of the ablated material and applied pulse duration. During ps laser ablation the absolute nanoparticle emission rate is higher than during fs laser ablation, whereas the emission rate per pulse is two magnitudes lower. Finally, the nanoparticle emission rates and its nanoparticle surface equivalent for ps and fs laser micromachining of metal and ceramic are compared with inflammatory thresholds derived from toxicology studies. It would take more than 6.500 working days to exceed this theoretical threshold of inflammation during laser operation at 0.5-2W and at least 260 working days using high-power lasers.
机译:已知纳米颗粒会对健康造成不利影响。但是在激光加工过程中无法避免纳米颗粒的产生,特别是超短脉冲激光烧蚀会释放大量纳米颗粒。将皮秒(ps)激光烧蚀期间发射的纳米颗粒尺寸分数与飞秒(fs)激光烧蚀期间使用钢,氧化锆和黄铜释放的纳米颗粒尺寸分数进行比较。在相同的脉冲能量下,fs脉冲在气溶胶级分中释放出相似份额的纳米颗粒(> 80%),与ps相比,fs在金属和陶瓷加工过程中产生了更高比例的超小(7 nm)尺寸的颗粒。频率最大值对应于50 nm的粒径,与烧蚀的材料和施加的脉冲持续时间无关。在ps激光烧蚀过程中,纳米粒子的绝对发射速率高于fs激光烧蚀过程,而每个脉冲的发射速率要低两个数量级。最后,将金属和陶瓷的ps和fs激光微加工的纳米粒子发射速率及其纳米粒子表面当量与毒理学研究得出的炎症阈值进行了比较。在0.5-2W的激光操作过程中,超过此理论炎症阈值将需要超过6.500个工作日,而使用大功率激光器则至少需要260个工作日。

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