Synthetic spatial coherence function for optical tomography and profilometry: influence of the observation condition

摘要

We address the basic issue of the observation condition in a synthetic coherence function applied to optical tomography and profilometry, which has not been made clear in previous papers. We present a more general theory for interference fringe formation for spatial coherence control with a synthetic source. The generalized theory predicts the existence of the observation condition that can make the measurement insensitive to the tilt of the object, which will open the new possibility of measuring objects with rough surfaces. We present experimental results that quantitatively verify the validity of the principle and the prediction.