Optimal Design of Extremely Small Thrust VCM for Nanoindenter

摘要

Purpose of this paper is the optimal design of the extremely small thrnst VCM (Voice Coil Motor) for application of the Nanoindenter, which have to control a very small force and displacement. The VCM is designed by the optimization techniques to produce a very small force by the difference of flax density of the lower part from the higher one. As a result, the VCM produces linear driving thrust in 2 wide range of current.