Small-sized KrCl-, XeCl- and XeBr-excilamps

摘要

Simple configuration small-sized KrCl-, XeBr- and XeCl-excilamps based on near-surface capacitive discharge are offered. The devices are demonstrated to possess high specific energy characteristics (radiation power density of up to 10 mW/cm~2), permanently small radiation volume, as well as narrow radiation band. Operating lifetime of a sealed-off excilamp is above 1000 hrs.