Research on the performance parameter of 2D position Sensitive detector

摘要

The performance parameter of 2D Position Sensitive Detector (PSD) are analyzed and calculated theoretically. The non-linearity and distortion grid map of the theoretical calculation using this structure position formula are in good agreement with the experimental result. The experimental results show that with the signal processor, the position non-linearity(rms) is less than 0.15% in the 60% rang of a 13mmX13mm active area, the position error is <+-20μm. It has demonstrated that 2D PSD was obtained the best position non-linearity results of 13mmX13mm.