CORROSION RESISTANCE OF TiAlN/CrN, TiAIN, AND CrN COATINGS PREPARED BY RF MAGNETRON SPUTTERING

摘要

TiAIN wear resistant coatings are known to be superior to other coatings in protecting tools that may be damaged by corrosion, oxidization, and abrasion. CrN is a hard, chemically resistant substance that resists corrosion and oxidation. In this study, a TiAlN/CrN-multilayer was prepared by RF magnetron sputtering, followed by heat treatment at various temperatures. CrN and TiAIN monolayers were also prepared for comparison to the TiAlN/CrN-multilayer. Network and multiple cross link microstructures of CrN and TiAlN/CrN coatings were observed by FE-SEM. X-ray patterns of TiAIN. CrN and TiAlN/CrN show preferred orientations of TiAIN, Ti_3Al_2N_2, β-Cr_2N and γ-CrN.rnThe particle size in CrN and TiAlN/CrN coatings increases when heat treated at 700℃, have exaggerated size particles appear after heat treatment at 800℃.