Analysis dynamics of piezoelectric optical scanner with periodical microstructure

摘要

Piezoelectric optical scanner is developed for multi-coordinate control of optical laser beam by excitation of microstructures. The manufactured microstructure is the grating which implemented in piezoelectric optical scanner. Such type of opto-micro-mechanical systems can be used for accurate angular or linear deflection of optical elements in various optomechanical and optoelectronic systems. The operating principle of these devices is based on piezoelectric effect and on conversion of high-frequency multi-dimensional mechanical oscillations of piezoelectric vibration transducers into directional multi-coordinate motion of the optical elements in the measurement chain. The main distinctive feature of such optical piezoelectric scanners is the combination of high micrometer range resolution with a wide range of angular deflections of the scanning elements. The manufacturing process and visualization of the microstructure were presented. The device consists of piezoelectric cylinder and a scanning element with three degrees of freedom. The control model of this device was derived using simulation of the working regimes of optical scanner by COMSOL Multiphysics software. Optical holography system was used to validate the result of simulation of piezoelectric optical scanner and to test the functionality of piezoelectric optical scanner with implemented microstructures.