Advanced PVD R2R Equipment for Leading Edge Touch Panel Applications

摘要

A modular PVD system has been developed for the high productivity deposition of ITO based layer systems for the film based resistive and projective capacitive Touch Panel devices. The system is intelligently controlled and employs inline optical and electrical layer property and thickness measurement systems to ensure through-roll layer quality confirmation. Processes have been developed for both simple two layer analog resistive touch panel devices in addition to the more complex four layer projective capacitive device architecture.