In-line sputter system prepared L10 ordered FePt granular film for HAMR application

摘要

The FePt base composite films for HAMR application have been developed by using the in-line sputter system. The microstructure development of the FePt based HAMR media as a function of film thickness was investigated. It was found that for fixed doping concentration, the grain size slightly increases with the increasing film thickness. The well-isolated FePt grains with main grain size of 6.4 nm ±0.6 nm were obtained for 6 nm FePt-C film. The developed FePt-C composite film with well-isolated FePt grains has the potential to be used as the recording media for HAMR application.