Characteristics of Micro-precision Machining of Glasses by Powder Blasting

摘要

Powder blasting is similar to sand blasting and effectively removes hard and brittle materials. With an increase in the need for machining of ceramics, semiconductors, electronic devices and LCDs, micro abrasive jet machining has become a useful technique for micro-machining. In this study, we first investigated the effects of the blasted glass surface's characteristics and shape under different blasting parameters; second, we examined the predictive models for material removal and surface roughness that have been developed in terms of blasting pressure, scanning speed and abrasive flow, using response surface methodology by experimental data. The established equation shows that the blasting pressure was the main factor influencing the material removal and surface roughness. In addition, analysis of variance for the first-order model of material removal and surface roughness shows that the coefficient of determination (R~2) is 99% and 98%, respectively. The associated p-value for the two models was lower than 0.01, indicating that the models are statistically significant.