Metal Bipolar Plate with Micro Sensors

摘要

The fuel cell has the potential to become an indispensable source of electric power. However, some problems have not yet been resolved. Measuring the temperature and humidity inside the fuel cells is currently difficult. Accordingly, in this study, micro sensors were fabricated within the fuel cell, in which the temperature and humidity distributions were measured. The substrate of the fuel cell was made of stainless steel (SS-304) and etching was employed to fabricate the channel on the stainless steel substrate. Then micro-electro-mechanical-systems (MEMS) technology was used to fabricate the array micro temperature and humidity sensors on the rib of channel of stainless steel. The advantages of array micro temperature sensors are their small volume, their high accuracy, their short response time, the simplicity of their fabrication, their mass production and their ability to measure the temperature at a precise location more effectively than the traditional thermocouple. The micro humidity sensors were made from gold and titanium as down and up electrodes in the channel. The performance curve of the single cell was operating at 41.54 ℃ and gas flow rates of H_2/O_2 at 200/200ml/min. The max power density of the bipolar with micro sensor was 56 mW/cm~2.