Simultaneous measurement of surface profile and thickness variation of transparent parallel plate using wavelength tuning Fizeau interferometer

摘要

In this study, a 6N- 5 phase shifting algorithm comprising a polynomial window function and discrete Fourier transform is developed for the simultaneous measurement of the surface shape and optical thickness of a transparent plate. The characteristics of the 6N - 5 algorithm were estimated by connection with the Fourier representation. The phase error of the measurements performed using the 6N-5 algorithm is discussed and compared with those of measurements obtained using other algorithms. Finally, the surface shape and optical thickness of a transparent plate were measured simultaneously using the 6N-5 algorithm and a wavelength tuning interferometer.