Leaching Study of Liquid Flow Controllers Made of Chemically Modified PTFE in Ultra Pure Water - Industrialization of Ultra Pure Liquid Flow Controllers in Semiconductor Market

摘要

An ultra pure liquid flow controller part has been manufactured based on two grades of chemically modified PTFE resins by EGC Plastics. The liquid flow controller parts for the two samples are leached according to provisional SEMI F57-0301 and SEMI F40-0699 protocols in static ultra pure water (UPW) at 85 ± 5 ℃ for 7 days. The concentration of total oxidizable carbon (TOC), anions, cations, and trace metal elements is measured after leaching. The parameters of one sample were found to be compatible with the SEMI F57 specification except that the concentration of lead is slightly higher than specification. However, the results meet the customer requirements.