MILLIMETER-SCALE REFLECTING OPTICS FABRICATED USING ELLIPTICAL VIBRATION-ASSISTED MACHINING (EVAM)

摘要

The Ultramill EVAM tool can been used to make a variety of feature geometries, including flats, binary features, trihedrons, and sculpted 3-D features. A fiber optic beam splitter been designed which features ellipsoidal reflecting surfaces to be machined using the Ultramill. This concept eliminates additional refracting elements, such as ball lenses, used by existing beam splitter concepts for collimation. Concave reflecting surfaces with spherical form have been machined by the Ultramill to see the form errors that would be present in the elliptical sections. Several surfaces were machined and errors have been removed on successive parts, reducing the figure error to 62 nm RMS.