首页> 外文会议>Advances in Resist Technology and Processing XXIII pt.2 >Acidolysis Small Molecular Phenolic Ether Used as Accelerator in Photosensitive Diazonaphthaquinone Systems
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Acidolysis Small Molecular Phenolic Ether Used as Accelerator in Photosensitive Diazonaphthaquinone Systems

机译:酸解小分子酚醚在光敏重氮萘醌体系中用作促进剂

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The photosensitive compounds in the photosensitive coatings of positive PS plates are the diazonaphthaquinone derivatives. Some acidolysis small molecular phenolic ethers, which were synthesized by some special polyhydroxyl phenols with vinyl ethyl ether, are added in the positive diazonaphthaquinone photosensitive composition to improve its sensitivity, composed with photo-acid-generators. The effects to the photosensitivity, anti-alkali property, anti-isopropyl alcohol property, dot resolution and line resolution of the coatings are studied with different additive percent of the special phenolic ethers. In the conventional photosensitive diazonaphthaquinone systems for positive PS plates, the photosensitivity is improved without negative effects to resolution, anti-alkali and anti-isopropyl alcohol properties when added about 5% of the special acidolysis phenolic ethers, EAAE or DPHE, composed with photo-acid-generators.
机译:正极PS板光敏涂层中的光敏化合物是重氮萘醌衍生物。在正重氮萘醌光敏组合物中加入一些由某些特殊的多羟基苯酚与乙烯基乙基醚合成的酸解小分子酚醚,以提高其感光度,该光引发剂由光致产酸剂组成。研究了不同添加剂百分数的特种酚醚对光敏性,抗碱性能,抗异丙醇性能,点分辨率和线分辨率的影响。在用于PS感光板的常规光敏二氮杂萘醌体系中,当添加约5%的特殊酸解酚醚,EAAE或DPHE(由光敏组合物组成)时,可提高光敏性,而不会对分辨率,抗碱和抗异丙醇性能产生负面影响。产酸剂。

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