Design and Performance Study of a 3-DOF Micropositioning Table

摘要

In order to implement dynamic compensation for the wheel vibration of surface grinding machine, a micropositioning table with high stiffness and response frequency is designed. The micropositioning table is driven by three piezoelectric actuators with stiffness of 400 N/μm. Three capacitive sensors are utilized to form feedback control and flexure hinges are used to guide the moving part and preload for the piezoelectric actuators. The kinetics of the micropositioning table has been analyzed to understand the relationship of the control voltage and the posture of the moving part. Due to the coupling characteristic of the system, the decoupling control method is introduced to improve the performance of the table. Experimental tests are carried out to investigate the performance of the micropositioning table.