OPTICAL AND TACTILE COMPARISONS IN SURFACE AND CONTOUR METROLOGY

摘要

There is an ongoing discussion concerning the comparability of tactile and optical dimensional measurements. There is no doubt that optical results can differ from tactile results. The size of the difference depends on the measuring task and the influences during measurement. Due to improvements in the evaluation of optical measurements and a better understanding of the influences the difference for many measuring task is reduced to a level that can be neglected. In this case the optical metrology has advantages especially concerning measuring time. The results of two investigations concerning the comparison of optical and tactile measurements for surface and contour measurement are presented.