GAS PERMEABILITY IN NANOPOROUS SUBSTRATES

摘要

To reduce component size, nanosized powders are being used more frequently in the fabrication of multilayer ceramic capacitors. As a consequence of the small particle size, the gas permeability can be greatly reduced, which makes binder removal by thermal methods a more difficult process. In this paper, we show how the permeability can be determined in the nanopore size range from the combined outcome of both experiments and modeling. This approach utilizes measurements of the flux through a substrate to determine the pore size, which is then used to determine the relative contributions from Knudsen, slip, and laminar flow. This technique is applied to a membrane material with specified, narrow pore size.