Barrier property Enhancement of Plastic Substrates for Flexible Display by Inorganic-organic Hybrid Multilayer

摘要

Inorganic-organic hybrid multilayers were formed on the plastic substrate to enhance the barrier properties of substrate to water vapor and oxygen transport. Plasma pretreatment of substrate with Ar/O_2 lead to adhesion improvement and the densification of inorganic layer on the substrates. Combination of SiO_xN_y layer and silane-nanoclay composite layer offered quite good barrier properties (WVTR and OTR) to PES substrate.