STICKING EFFECT ON CIRCULAR PLATES IN MICROSTRUCTURES

摘要

In wet etching and cleaning processes, a circular plate under surfacernmicromachining may adhere to its underlying substrate, due to the capillary forcernof liquid. This paper studied the sticking effect between a center-anchored circularrnplate and its underlying substrate. Using the balance of the capillary and elasticrnforces, a critical gap is derived to find the gap for adhesion. Using the energyrnmethod, another critical gap is derived to determine the condition for releasing thernplate by the elastic force. The gap, the anchor radius, and the outer radius arernrelated for determining the criterion of adhesion.