The application of rapid SIMS analysis for theidentification of surface contamination in TFT-LCD manufacturing

摘要

Sodium is a serious contamination in LTPS TFTrnprocess. It causes the abnormal characteristics ofrnTFT in operation. Contaminated areas can be seen inrnSEM images, but EDX measurements do not havernadequate sensitivity to confirm the presence ofrnsuperficial sodium residues. We employed SIMS as arnfast analysis method to map the non-uniformrndistribution of sodium on the surface. SIMS can alsornindicate the thickness of the contamination.